Sputter deposition of thin-film capacitors onto low temperature co-fired ceramic substrates by jack edwin murray a thesis presented to the faculty of the graduate. Experimental and modeling studies of low-energy ion sputtering for ion thrusters michael r nakles (abstract) this thesis investigates low-energy xenon-molybdenum. Characterization of uncoated and sputter coated nanofibers a thesis presented to the graduate faculty of the university of akron in partial fulfillment. Simulation results generally support experimental findings and render many basic assumptions of analytic sputtering theory dubious this thesis consists of. In particular, the damage---or sputtering---caused by slow ions on solid surfaces is extremely difficult to quantify thesis (dissertation (phd). Characterization of rf and dc magnetron reactive sputtered tio2 thin films for gas though the ion bombardment during the sputtering of the surface could influence.
Ion beam sputtering thesis city how much light. 13 aims of the thesis magnetron sputtering (or any other pvd method), which allows film generation at noticeably , , substrate. Sputtering yields for uranium metal under bombardment by 13 - 120 kev protons and by 20 - 120 kev he+ are presented angular distributions of the material sputtered. An abstract of the thesis of metallization via magnetron sputtering by justin b ong a thesis submitted to oregon state university in partial ful llment of.
I design, construction, and optimization of a magnetron sputtering system for urania deposition by david joseph gennardo thesis submitted in partial fulfillment of. Some links on this page may take you to non-federal websites their policies may differ from this site. Study of indium tin oxide (ito) for novel optoelectronic devices phd thesis by shabbir a bashar 32 ito deposition by reactive rf sputtering.
Thin film deposition physical vapor deposition (pvd) - film is formed by atoms directly transported from source to the substrate through gas phase • sputtering. Aluminum nitride films by reactive sputtering by alvin g randolph, iii a thesis submitted in partial fulfillment ofthe requirements for the degree of.